Diffusion furnace tube is mainly used in photovoltaic cells and semiconductor heat treatment equipment, heating module adopts vacuum absorption molding process, with more uniform density, low thermal conductivity and low shrinkage and other characteristics, we can provide you with design and production according to your furnace tube size, temperature and other requirements.

The diffusion furnace heater can be designed as a flat or horizontal type to be closer to the customer's operating environment. Generally, the application of this heater is very wide, including: oxidation/annealing/diffusion/photoresist drying /PECVD/LPCVD/ boron diffusion/phosphorus diffusion/Gallium arsenide growth/indium phosphide growth/Gallium nitride epitaxy/gallium oxide sintering/Optical fiber sintering.

The internal refractory is formed by vacuum adsorption. Using KANTHAL or HRE resistance wire as the heating elements. 

Applied to the high-precision furnace heater of semiconductor heat treatment equipment,the temperature field is more uniform and the service life is longer than traditional heaters.

Applied to photovoltaic cells heat treatment equipment, the electric heater adopts vacuum wet forming,the heating element is not easily deformed, the furnace body is lightweight, and the energy consumption is low.

Our heaters are also widely used in more industry scenarios, if you have any needs, please contact us.